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Horizontal PECVD (Two-In-One)

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Horizontal PECVD (Two-In-One)

AlOx+SiN deposition.

Equipment Name:

Horizontal PECVD (Two-In-One)

Equipment Model:

PD-520/PD-520L/PD-520MAX

Equipment Application:

AlOx+SiN deposition.


Features:


1、The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.  

2、Optimal throughout solution: two-in-one configuration. 


Parameters: